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Description
Plasma flood guns (PFGs) are widely used to
neutralize wafer charge during the doping process in
modern ion implanters. Compared with traditional dc
arc discharge with filament and RF discharge, the
microwave driven source that has long lifetime and
has no metallic contamination is regarded as a
potential choice of PFG [1]. Attempt to develop a
large scale PFG based on 2.45 GHz microwave driven
sources was launched at Peking University (PKU). A
prototype one is a miniaturized 2.45 GHz permanent
magnet electron cyclotron resonance (ECR) source to
produce point-like electron beam. In previous
experiments, more than 8 mA electron beam has
been extracted with a Φ6 mm extraction hole at an
input microwave power of 22 W with argon gas [2].
Recently, studies are focusing on the possibility of
producing of ribbon electron beams as PFG with
2.45GHz microwave driven surface wave plasma
(SWP) source. A cylindrical chamber surface wave
plasma generator with a using cylindrical dielectric
waveguide and a 70 mm×3 mm extraction slit was
fabricated. The primary test results were obtained.
More details of this PFGs will be discussed in this
work.