Speaker
Description
Electron cyclotron resonance ion source (ECRIS) has
been constructed for producing synthesized ion
beams in Osaka Univ.,* Xe is used as fuel for ion
propulsion engines on artificial satellites. There are
problems of accumulated damages at irradiation and
sputtering by low energy Xe ion from the engine. It is
required to construct experimentally sputtering yield
databases of ion beams in the low energy region from
several hundred eV to 1keV, since there are not
enough data of satellite component materials.
Therefore, we are trying to investigate experimentally
sputtering yield on materials by irradiating the low
energy single species Xeq+ ion beams. However,
there is a problem that if the low extraction voltage,
the amount of beam currents is not enough to obtain
ion beam flux for precise evaluation of sputtering
yield data. Thus, we conduct to decelerate Xeq+ ion
beams required low energy region after extracting at
high voltage, e.g., 10kV. We measured the
decelerated beam profile with x and y direction wire
probes. As a result, we were able to estimate the
dose of ion fluxes. We are going to conduct
irradiation experiments on various materials.